MEMS and Nanotechnology-based Sensors and Devices for Communications, Medical and Aerospace Applications presents multiple types of MEMS devices and sensors for various potential applications in commercial, industrial, military, and space systems. This book addresses design and development issues for nanotechnology-based MEMS devices and sensors, including weight, size, and power consumption requirements. With sample calculations as well as MathCad examples, this comprehensive text also details cutting-edge fabrication and packaging techniques and summarizes the benefits of MEMS devices in health monitoring, microneurosurgery, remotely piloted vehicles, UAVs, space surveillance, and medical diagnostics applications.