About the Editors XVII Series Editors Preface XIX Preface XXI List of Contributors XXV 1 High-Speed Microfluidic Manipulation of Cells 1 Aram J. Chung and Soojung Claire Hur 1.1 Introduction 1 1.2 Direct Cell Manipulation 3 1.2.1 Electrical Cell Manipulation 3 1.2.2 Magnetic Cell Manipulation 4 1.

2.3 Optical Cell Manipulation 4 1.2.4 Mechanical Cell Manipulation 5 1.2.4.1 Constriction-Based Cell Manipulation 5 1.2.

4.2 Shear-Induced Cell Manipulation 7 1.3 Indirect Cell Manipulation 9 1.3.1 Cell Separation 9 1.3.1.1 Hydrodynamic (Passive) Cell Separation 13 1.

3.1.2 Nonhydrodynamic (Active) Particle Separation 18 1.3.2 Cell Alignment (Focusing) 25 1.3.2.1 Cell Alignment (Focusing) for Flow Cytometry 28 1.

3.2.2 Cell Solution Exchange 29 1.4 Summary 31 Acknowledgments 31 References 31 2 Micro and Nano Manipulation and Assembly by Optically Induced Electrokinetics 41 Fei Fei Wang, Sam Lai, Lianqing Liu, Gwo-Bin Lee, and Wen Jung Li 2.1 Introduction 41 2.2 Optically Induced Electrokinetic (OEK) Forces 45 2.2.1 Classical Electrokinetic Forces 45 2.

2.1.1 Dielectrophoresis (DEP) 45 2.2.1.2 AC Electroosmosis (ACEO) 46 2.2.1.

3 Electrothermal Effects (ET) 47 2.2.1.4 Buoyancy Effects 47 2.2.1.5 Brownian Motion 47 2.2.

2 Optically Induced Electrokinetic Forces 48 2.2.2.1 OEK Chip: Operational Principle and Design 48 2.2.2.2 Spectrum-Dependent ODEP Force 53 2.2.

2.3 Waveform-Dependent ODEP Force 54 2.3 OEK-Based Manipulation and Assembly 55 2.3.1 Manipulation and Assembly of Nonbiological Materials 55 2.3.2 Biological Entities: Cells and Molecules 60 2.3.

3 Manipulation of Fluidic Thin Films 63 2.4 Summary 65 References 67 3 Manipulation of DNA by Complex Confinement Using Nanofluidic Slits 75 Elizabeth A. Strychalski and Samuel M. Stavis 3.1 Introduction 75 3.2 Slitlike Confinement of DNA 78 3.3 Differential Slitlike Confinement of DNA 82 3.4 Experimental Studies 83 3.

5 Design of Complex Slitlike Devices 86 3.6 Fabrication of Complex Slitlike Devices 88 3.7 Experimental Conditions 90 3.8 Conclusion 92 Disclaimer 93 References 93 4 Microfluidic Approaches for Manipulation and Assembly of One-Dimensional Nanomaterials 97 Shaolin Zhou, Qiuquan Guo, and Jun Yang 4.1 Introduction 97 4.2 Microfluidic Assembly 99 4.2.1 Hydrodynamic Focusing 100 4.

2.1.1 Concept and Mechanism 100 4.2.1.2 2D and 3D Hierarchy 101 4.2.1.

3 Symmetrical and Asymmetrical Behavior 103 4.2.2 HF-Based NWAssembly 104 4.2.2.1 The Principle 104 4.2.2.

2 Device Design and Fabrication 105 4.2.2.3 NWAssembly by Symmetrical Hydrodynamic Focusing 107 4.2.2.4 NWAssembly by Asymmetrical Hydrodynamic Focusing 108 4.3 Summary 112 References 113 5 Optically Assisted and Dielectrophoretical Manipulation of Cells and Molecules on Microfluidic Platforms 119 Yen-Heng Lin and Gwo-Bin Lee 5.

1 Introduction 119 5.2 Operating Principle and Fundamental Physics of the ODEP Platform 122 5.2.1 ODEP Force 122 5.2.2 Optically Induced ACEO Flow 123 5.2.3 Electrothermal (ET) Force 125 5.

2.4 Experimental Setup of an ODEP Platform 126 5.2.4.1 Light Source 126 5.2.4.2 Materials of the Photoconductive Layer 127 5.

3 Applications of the ODEP Platform 129 5.3.1 Cell Manipulation 129 5.3.2 Cell Separation 130 5.3.3 Cell Rotation 130 5.3.

4 Cell Electroporation 131 5.3.5 Cell Lysis 131 5.3.6 Manipulation of Micro- or Nanoscale Objects 132 5.3.7 Manipulation of Molecules 134 5.3.

8 Droplet Manipulation 135 5.4 Conclusion 136 References 137 6 On-Chip Microrobot Driven by Permanent Magnets for Biomedical Applications 141 Masaya Hagiwara, Tomohiro Kawahara, and Fumihito Arai 6.1 On-Chip Microrobot 141 6.2 Characteristics of Microrobot Actuated by Permanent Magnet 142 6.3 Friction Reduction for On-Chip Robot 144 6.3.1 Friction Reduction by Drive Unit 144 6.3.

2 Friction Reduction by Ultrasonic Vibrations 146 6.3.3 Experimental Evaluations of MMT 146 6.3.3.1 Positioning Accuracy Evaluation 146 6.3.3.

2 Output Force Evaluation 149 6.4 Fluid Friction Reduction for On-Chip Robot 150 6.4.1 Fluid Friction Reduction by Riblet Surface 150 6.4.2 Principle of Fluid Friction Reduction Using Riblet Surface 150 6.4.3 Optimal Design of Riblet to Minimize the Fluid Friction 152 6.

4.4 Fluid Force Analysis on MMT with Riblet Surface 153 6.4.5 Fabrication Process of MMT with Riblet Surface Using Si-Ni Composite Structure 156 6.4.6 Evaluation of Si-Ni Composite MMT with Optimal Riblet 158 6.5 Applications of On-Chip Robot to Cell Manipulations 160 6.5.

1 Oocyte Enucleation 160 6.5.2 Multichannel Sorting 162 6.5.3 Evaluation of Effect of Mechanical Stimulation on Microorganisms 162 6.6 Summary 165 References 166 7 Silicon Nanotweezers for Molecules and Cells Manipulation and Characterization 169 Dominique Collard, Nicolas Lafitte, Hervé Guillou, Momoko Kumemura, Laurent Jalabert, and Hiroyuki Fujita 7.1 Introduction 169 7.2 SNT Operation and Design 170 7.

2.1 Design 170 7.2.1.1 Electrostatic Actuation 171 7.2.1.2 Mechanical Structure 171 7.

2.1.3 Capacitive Sensor 173 7.2.2 Operation 174 7.2.2.1 Instrumentation 174 7.

2.2.2 Characterization 175 7.2.2.3 Modeling 176 7.3 SNT Process 177 7.3.

1 MEMS Fabrication versus the Design Constrains and User Applications 177 7.3.2 Sharp Tip Single Actuator SNT Process Flow 178 7.3.2.1 Nitride Deposition 178 7.3.2.

2 Defining Crystallographic Alignment Structures 178 7.3.2.3 Photolithography (Level 1) - Nitride Patterning for LOCOS 179 7.3.2.4 Photolithography (Level 2) - Sensors and Actuators 179 7.3.

2.5 DRIE Front Side 180 7.3.2.6 Sharp Tip Fabrication and Gap Control 181 7.3.2.7 Photolithography (Level 3) and Rearside DRIE 182 7.

3.2.8 Releasing in Vapor HF 182 7.3.3 Concluding Remarks on the Silicon Nanotweezers Microfabrication 183 7.4 DNA Trapping and Enzymatic Reaction Monitoring 183 7.5 Cell Trapping and Characterization 186 7.5.

1 Introducing Remarks 186 7.5.2 Specific Issues 187 7.5.3 Design of SNT 187 7.5.4 Instrumentation 189 7.5.

5 Experimental Platform 190 7.5.6 Cells in Suspension 190 7.5.7 Spread Cells 192 7.5.8 Cell Differentiation 193 7.5.

9 Concluding Remarks for Cell Characterization with SNT 194 7.6 General Concluding Remarks and Perspectives 194 Acknowledgments 196 References 196 8 Miniaturized Untethered Tools for Surgery 201 Evin Gultepe, Qianru Jin, Andrew Choi, Alex Abramson, and David H. Gracias 8.1 Introduction 201 8.2 Macroscale Untethered Surgical Tools 203 8.2.1 Localization and Locomotion without Tethers 204 8.2.

1.1 Localization 204 8.2.1.2 Locomotion 206 8.2.2 Powering and Activating a Small Machine 207 8.2.

2.1 Stored Chemical Energy 207 8.2.2.2 Stored Mechanical Energy 208 8.2.2.3 External Magnetic Field 208 8.

2.2.4 Other Sources of Energy 209 8.3 Microscale Untethered Surgical Tools 210 8.3.1 Applications 210 8.3.1.

1 Angioplasty 210 8.3.1.2 SurgicalWound Closure 212 8.3.1.3 Biopsy 213 8.3.

1.4 Micromanipulation 214 8.3.2 Locomotion 214 8.3.2.1 Magnetic Force 215 8.3.

2.2 Electromechanical 217 8.3.2.3 Optical Tweezers 218 8.3.2.4 Biologic Tissue Powered 219 8.

4 Nanoscale Untethered Surgical Tools 219 8.4.1 Fuel-Driven Motion 222 8.4.2 Magnetic Field-Driven Motion 223 8.4.3 AcousticWave-Driven Motion 225 8.4.

4 Light-Driven Motion 226 8.4.5 Nano-Bio Hybrid Systems 227 8.4.6 Artificial Molecular Machines 227 8.5 Conclusion 228 Acknowledgments 229 References 229 9 Single-Chip Scanning ProbeMicroscopes 235 Neil Sarkar and Raafat R. Mansour 9.1 Scanning Probe Microscopy 237 9.

2 The Role of MEMS in SPM 239 9.3 CMOS-MEMS Manufacturing Processes Applied to sc-SPMs 240 9.4 Modeling and Design of sc-SPMs 242 9.4.1 Electrothermal Model of Self-Heated Resistor 245 9.4.2 Electrothermal Model of Vertical Actuator 247 9.4.

3 Electro-Thermo-Mechanical Model 248 9.5 Imaging Results 250 9.6 Conclusion 254 References 254 10 Untethered Magnetic Micromanipulation 259 Eric Diller and Metin Sitti 10.1 Physics of Micromanipulation 260 10.2 Sliding Friction and Surface Adhesion 260 10.2.1 Adhesion 260 10.2.

1.1 van der Waals Forces 262 10.2.2 Sliding Friction 263 10.3 Fluid Dynamics Effects 264 10.3.1 Viscous Drag on a Sphere 265 10.4 Magnetic Microrobot Actuation 266 10.

5 Locomotion Techniques 266 10.5.1 Motion in Two Dimensions 267 10.5.2 Motion in Three Dimensions 267 10.5.3 Magnetic Actuation Systems 268 10.5.

4 Special Coil Arrangements 269 10.6 Manipulation Techniques 271 10.6.1 Contact Micromanipulation 271 10.6.1.1 Direct Pushing 271 10.6.

1.2 Grasping Manipulation 274 10.