Introduction Plasma and Its Classification Application of Low-Temperature Plasma Academic Fusion References Phenomenological Description of the Charged Particle Transport Transport in Real (Configuration) Space Transport in Velocity Space Thermal Equilibrium and Its Governing Relations References Macroscopic Plasma Characteristics Introduction Quasi-Neutrality Charge-Separation in Plasmas Plasma Shielding Particle Diffusion Bohm Sheath Criterion References Elementary Processes in Gas Phase and on Surfaces Particles and Waves Collisions and Cross Sections Classical Collision Theory Quantum Theory of Scattering Collisions between Electrons and Neutral Atoms/Molecules Electron-Atom Collisions Electron-Molecule Collisions Nonconservative Collisions of Electrons with Atoms and Molecules Heavy Particle Collisions Photons in Ionized Gases Elementary Processes at Surfaces References The Boltzmann Equation and Transport Equations of Charged Particles Introduction The Boltzmann Equation Transport Coefficients The Transport Equation Collision Term in the Boltzmann Equation Boltzmann Equation for Electrons References General Properties of Charged Particle Transport in Gases Introduction Electron Transport in DC-Electric Fields Electron Transport in RF Electric Fields Ion Transport in DC-Electric Fields References Modeling of Nonequilibrium (Low-Temperature) Plasmas Introduction Continuum Models Particle Models Hybrid Models Circuit Model Electromagnetic Fields and Maxwell's Equations References Numerical Procedure of Modeling Time Constant of the System Numerical Techniques to Solve the Time-Dependent Drift-Diffusion Equation Boundary Conditions References Capacitively Coupled Plasma Radio-Frequency Capacitive Coupling Mechanism of Plasma Maintenance References Inductively Coupled Plasma Radio-Frequency Inductive Coupling Mechanism of Plasma Maintenance Wave Propagation in Plasmas References Magnetically Enhanced Plasma Direct-Current Magnetron Plasma Unbalanced Magnetron Plasma RF Magnetron Plasma Magnetic Confinements of Plasmas Magnetically Resonant Plasmas References Plasma Processing and Related Topics Introduction Physical Sputtering Plasma Chemical Vapor Deposition Plasma Etching References Index.